What is the 10% rule for nanoindentation?
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Application Notes
What is the 10% rule for nanoindentation? - Micro Materials UK
The 10% rule for nanoindentation states that the indentation depth should not exceed 10% of the total thickness of the material or thin film being tested. This rule helps ensure that the hardness measurement reflects the properties of the material itself rather than being influenced by the underlying substrate.
Why is the 10% Rule Important?
- Avoids Substrate Effect – If the indentation is too deep, the hardness value may be affected by the substrate rather than just the thin film.
- Ensures Accurate Measurements – Shallow indentation keeps the focus on the material’s surface properties.
- Minimizes Pile-Up and Sink-In Errors – These deformation effects can distort results if the indentation is too deep.
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Inside a NanoTest Xtreme nanomechanical test system, capable of testing at high temperatures, upto and exceeding 1000 °C , under high vacuum conditions


Image showing high temperature nanoindentation testing at temperatures over 900 °C using the NanoText Xtreme instrument supplied by Micro Materials Ltd
Image taken by Adrian Harris of Micro Materials Ltd, showing localised heating at 950 °C on an Xtreme system


Image taken by Andrew Bird (Micro Materials Ltd), showing localised heating at
750 °C on an Xtreme system in use at the University of Oxford
Nanomechanical testing to 1000 °C
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To further enhance your experience and understanding, we invite you to check out the following pages on our website that we believe are essential to your journey with us:
- High-Temperature Nanoindentation Testing for Advanced Material Characterization
- Advanced Nano Scratch and Wear Testing for Coatings and Materials
- Nano-Impact Testing for Advanced Material Performance in High-Stress Applications
These pages offer valuable insights and resources to help you achieve your goals.