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Control of friction and wear of moving parts is a key issue for the reliability of Microelectromechanical (MEMS) Devices. A common problem is that they are fabricated from Si wafers using techniques originally developed by the microelectronics industry. Unlubricated Si02 surfaces (Si with its native oxide) are very hydrophilic and therefore suffer from high friction and wear, and unwanted adhesion. Solid lubrication approaches are being developed to combat this – and low friction, hard coatings that are resistant to abrasive wear are being developed which lower the surface energy. The NanoTest is being used to assess potential overcoat formulations, such as Diamond-like carbon. |
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Application Notes on Nanotribology
Nano-scale friction – correlate friction and wear rate to investigate wear mechanisms Nano-scale fatigue resistance of DLC – influence of deposition power
Scratch testing of DLC and Silicon surfaces Adhesion of DLC Films to Silicon
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